Precision Cleaning Solutions

ASAHI SUNAC New Components Division > Solutions > Precision Cleaning Solutions

Example Applications for the High Pressure Micro Jet (HPMJ®) Cleaning System

Wet Process Improvement Flow Using HPMJ®

Case Example 1: Replace brush cleaning with our HPMJ®. Replace low pressure shower cleaning with our HPMJ®.

By replacing your existing line cleaning configuration with our HPMJ®, the cleaning performance is improved without increasing the number of processes.

Result

A wide range of particles the micron to submicron level are removed.
By using a non-contact cleaning method, the impact on the workpiece is minimized.

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Case Example 2: Add our HPMJ® to your cleaning line.

Your cleaning performance will be improved when adding our HPMJ® to an open space in your existing cleaning line configuration.
Adding our compact design unit takes up minimal space.

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Case Example 3: Attach our HPMJ® to your wafer polishing system.

Result

Cleaning your polishing pad will extend its life.
By removing particles on the polishing pad, micro scratches on the workpiece are minimized.

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Case Example 4: Add our HPMJ® before the ultrasonic cleaning process.

Result

By combining the effects with ultrasonic cleaning, the cleaning performance is improved.
This system reduces the number of times the ultrasonic cleaning fluid needs to be replaced.
This system can clean the wafer cassette at the same time.

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Case Example 5: Attach our HPMJ® to your film cleaning system.

Result

The particles embedded in the film are removed.
The non-contact cleaning method does not scratch or damage the film surface.

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Case Example 6: Attach our HPMJ® to your chemical removal and cleaning system.

The HPMJ® is compatible with various types of chemical solutions for delivery and projecting applications.
(Contact us to find out which chemical solutions are compatible with our HPMJ®)

Result

By combining the chemical's action with the jetting effect, the removal time is significantly reduced.

* “HPMJ”is a registered trademark of Asahi Sunac Co., Ltd. registered in Japan, China, USA, Korea, Taiwan, Malaysia, Singapore.

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